Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm
Year of publication
2012
Authors
Pursula, Pekka; Saarilahti, Jaakko; Paul, O.; Viikari, V.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
Conference
23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Publisher
Ilmenau University of Technology
Article number
4 p.
ISBN
Open access
Open access in the publisher’s service
Yes
Self-archived
No
Other information
Keywords
[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes