Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres
Year of publication
2009
Authors
Kolari, Kai; Vehmas, Tapani; Svensk, Olli; Törmä, Pekka; Aalto, Timo
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Conference
Volume
2010
Issue
T141
Article number
014017
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences
Keywords
[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1088/0031-8949/2010/T141/014017
The publication is included in the Ministry of Education and Culture’s Publication data collection
No