Direct bonding of oxidized cavity wafers
Year of publication
2008
Authors
Palokangas, M.; Dekker, James; Henttinen, Kimmo; Mäkmen, J.
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Dekker James
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal
Conference
Volume
16
Issue
8
Pages
457-463
ISSN
Publication forum
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1149/1.2982900
The publication is included in the Ministry of Education and Culture’s Publication data collection
No