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Fabrication and characterization of IC compatible through-wafer polysilicon interconnects

Year of publication

2007

Authors

Luusua, Ismo; Henttinen, Kimmo; Pekko, Panu; Vehmas, Tapani

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Pekko Panu

Vehmas Tapani

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

ECS Transactions

Conference

209th ECS Meeting

Volume

2

Issue

25

Pages

27-31

ISSN

1938-5862

​Publication forum

55028

Open access

Open access in the publisher’s service

No information

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

No