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Surface and bulk micromachining techniques for lumped components filters manufacturing

Year of publication

2005

Authors

Vähä-Heikkilä, Tauno; Giacomozzi, F.; Margesin, B.; Petrini, I.; Vasilache, D.; Neculoiu, D.; Buiculescu, C.; Müller, A.; Konstantinidis, G.; Kostopoulos, T.; Psychias, Y.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Vähä-Heikkilä Tauno

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

Series in Micro and Nanoengineering

Parent publication name

MEMS technologies for RF and millimeter wave circuits

Conference

6th International Workshop MEMSWAVE 2005

Publisher

Editura Academiei Române

Volume

8

Pages

210-215

ISSN

2067-9572

ISBN

978-973-27-1364-8

​Publication forum

8456

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

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Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

No