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Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Year of publication

2005

Authors

Pensala, Tuomas; Ylilammi, Markku; Makkonen, Tapani

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Ylilammi Markku

Makkonen Tapani

Pensala Tuomas

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

Proceedings - IEEE Ultrasonics Symposium

Parent publication name

2005 IEEE International Ultrasonics Symposium

Conference

IEEE International Ultrasonics Symposium

Publisher

IEEE Institute of Electrical and Electronic Engineers

Pages

1844-1847

ISSN

1051-0117

ISBN

978-0-7803-9382-0

​Publication forum

5475

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics; Materials engineering

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1109/ULTSYM.2005.1603229

The publication is included in the Ministry of Education and Culture’s Publication data collection

No