Stability and residue studies on complexing agents in SC-1 bath
Year of publication
2003
Authors
Saloniemi, Heini; Eränen, Simo; Ketola, Raimo; Kokkonen, Juha; Lehto, Sari; Luomaperä, Kaija; Vastamäki, Pertti; Siren, Heli; Anttila, Olli
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Non Peer-ReviewedMINEDU's publication type classification code
B3 Article in conference proceedings (non-peer-reviewed)Publication channel information
Parent publication name
Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
Conference
6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
Publisher
Trans Tech Publications
Pages
41
ISBN
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Chemical engineering; Materials engineering
Keywords
[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No