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"Plug-up" - A new concept for fabricating SOI MEMS devices

Year of publication

2003

Authors

Kiihamäki, Jyrki; Pekko, Panu; Kattelus, Hannu; Sillanpää, Teuvo; Mattila, Tomi

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Kattelus Hannu

Kiihamäki Jyrki Orcid -palvelun logo

Pekko Panu

Sillanpää Teuvo

Mattila Tomi

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Conference

5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003

Publisher

IEEE Institute of Electrical and Electronic Engineers

Pages

229-233

ISBN

0-7803-7066-X

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1109/DTIP.2003.1287042

The publication is included in the Ministry of Education and Culture’s Publication data collection

No