undefined

< Back to search results

Nonlinearities in single-crystal silicon micromechanical resonators

Year of publication

2003

Authors

Kaajakari, Ville; Mattila, Tomi; Kiihamäki, Jyrki; Kattelus, Hannu; Oja, Aarne; Seppä, Heikki

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Oja Aarne

Kattelus Hannu

Seppä Heikki

Kiihamäki Jyrki Orcid -palvelun logo

Mattila Tomi

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

TRANSDUCERS 2003- The 12th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

12th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers '03

Publisher

IEEE Institute of Electrical and Electronic Engineers

Pages

1574-1577

ISBN

978-0-7803-7731-8

​Publication forum

5475

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1109/SENSOR.2003.1217080

The publication is included in the Ministry of Education and Culture’s Publication data collection

No