Square-extensional mode single-crystal silicon micromechanical RF-resonator
Year of publication
2003
Authors
Kaajakari, Ville; Mattila, Tomi; Oja, Aarne; Kiihamäki, Jyrki; Kattelus, Hannu; Koskenvuori, Mika; Rantakari, Pekka; Tittonen, Ilkka; Seppä, Heikki
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Kiihamäki Jyrki 
Oja Aarne
Kattelus Hannu
Seppä Heikki
Mattila Tomi
Kaajakari Ville
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
Conference
12th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers '03
Pages
951-954
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics
Keywords
[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1109/SENSOR.2003.1216924
The publication is included in the Ministry of Education and Culture’s Publication data collection
No