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Management of static electricity and ESD in cleanroom production of electronics

Year of publication

2003

Authors

Paasi, Jaakko

Organizations and authors

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Non Peer-Reviewed

MINEDU's publication type classification code

B3 Article in conference proceedings (non-peer-reviewed)

Publication channel information

Journal

VTT Symposium

Conference

34th R3-Nordic Contamination Control Symposium

Publisher

VTT Technical Research Centre of Finland

Issue

229

Pages

349-374

Open access

Open access in the publisher’s service

Yes

License of the publisher’s version

Other license

Self-archived

No

Other information

Keywords

[object Object]

Language

English

International co-publication

Unknown

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

No