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Improvement of SC-1 Bath Stability by Complexing Agents

Year of publication

2002

Authors

Saloniemi, Heini; Visti, Taru; Eränen, Simo; Kiviranta, Arto; Anttila, Olli

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Kiviranta Arto

Saloniemi Heini

Eränen Simo

Visti Taru

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Physica Scripta

Conference

19th Nordic Semiconductor Meeting, NSM19<br/>

Volume

2002

Issue

T101

Pages

226-229

ISSN

0031-8949

​Publication forum

65009

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Language

English

International co-publication

No

Co-publication with a company

Yes

DOI

10.1238/Physica.Topical.101a00226

The publication is included in the Ministry of Education and Culture’s Publication data collection

No