Micromechanical bulk acoustic wave resonator
Year of publication
2002
Authors
Mattila, Tomi; Oja, Aarne; Seppä, Heikki; Jaakkola, Olli; Kiihamäki, Jyrki; Kattelus, Hannu; Koskenvuori, Mika; Rantakari, Pekka; Tittonen, Ilkka
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Oja Aarne
Kattelus Hannu
Seppä Heikki
Kiihamäki Jyrki 
Jaakkola Olli
Mattila Tomi
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Parent publication name
Pages
945-948
ISSN
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics
Identified topic
[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1109/ULTSYM.2002.1193551
The publication is included in the Ministry of Education and Culture’s Publication data collection
No