A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)
Year of publication
2002
Authors
Saarilahti, Jaakko; Blomberg, Martti; Häärä, Ari; Kattelus, Hannu
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Häärä Ari
Kattelus Hannu
Saarilahti Jaakko
Blomberg Martti
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Parent publication name
Pages
1071-1074
ISSN
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics
Keywords
[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1109/ULTSYM.2002.1192480
The publication is included in the Ministry of Education and Culture’s Publication data collection
No