Enhancing the electromechanical coupling in bulk acoustic mode microresonator
Year of publication
2002
Authors
Lamminmäki, Tuomas; Koskenvuori, Mika; Rantakari, Pekka; Tittonen, Ilkka; Oja, Aarne; Mattila, Tomi; Seppä, Heikki; Kiihamäki, Jyrki; Kattelus, Hannu
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Seppä Heikki
Kiihamäki Jyrki 
Rantakari Pekka
Mattila Tomi
Publication type
Publication format
Abstract
Parent publication type
Conference
Audience
Scientific
Publication channel information
Parent publication name
Conference
16th European Conference on Solid-State Transducers, Eurosensors XVI
Publisher
Czech Technical University
Pages
383-384
ISBN
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No