Electromechanical stability of capacitive transducers
Year of publication
2001
Authors
Oja, Aarne; Kyynäräinen, Jukka; Seppä, Heikki
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Non Peer-ReviewedMINEDU's publication type classification code
B3 Article in conference proceedings (non-peer-reviewed)Publication channel information
Journal/Series
Parent publication name
Design, Test, Integration and Packaging of MEMS/MOEMS 2001: Cannes, France, 25-27 July 2001
Volume
4408
Pages
463-468
ISSN
Publication forum
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1117/12.425379
The publication is included in the Ministry of Education and Culture’s Publication data collection
No