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AC and DC voltage standards based on silicon micromechanics

Year of publication

1998

Authors

Suhonen, Mika; Seppä, Heikki; Oja, Aarne; Heinilä, Marko; Näkki, Ismo

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Oja Aarne

Seppä Heikki

Näkki Ismo

Heinilä Marko

Suhonen Mika

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1109/CPEM.1998.699739

The publication is included in the Ministry of Education and Culture’s Publication data collection

No