Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS
Year of publication
1997
Authors
Likonen, Jari; Väkeväinen, K.; Ahlgren, T.; Räisänen, Jyrki; Rauhala, Esko; Keinonen, J.
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Likonen Jari
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
Conference
10th International Conference on Secondary Ion Mass Spectrometry (SIMS X)
Publisher
Wiley
Pages
903-906
ISBN
Open access
Open access in the publisher’s service
No information
Self-archived
No
Other information
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No