Electrical properties of Tantalum based composite oxide films
Year of publication
1993
Authors
Kattelus, Hannu; Ylilammi, Markku; Salmi, Jorma; Ranta-Aho, Timo; Nykänen, Erja; Suni, Ilkka
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Nykänen Erja
Kattelus Hannu
Suni Ilkka
Salmi Jorma
Ylilammi Markku
Ranta-Aho Timo
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
Parent publication editors
Devine, Roderick A.B.; Kanicki, Jerzy; Matsumura, Masakiyo; Warren, William L.
Conference
Publisher
Volume
284
Pages
511-516
ISSN
ISBN
Publication forum
Open access
Open access in the publisher’s service
No information
Self-archived
No
Other information
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1557/PROC-284-511
The publication is included in the Ministry of Education and Culture’s Publication data collection
No