A new method for simultaneous characterization of process cleanliness and true particle removal efficiency
Year of publication
1993
Authors
Henelius, N.; Anttila, Olli; Ronkainen, Hannu; Molarius, Jyrki
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Ronkainen Hannu
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Non Peer-ReviewedMINEDU's publication type classification code
B3 Article in conference proceedings (non-peer-reviewed)Publication channel information
Parent publication name
184th Electrochemical Society Fall Meeting: Preprinted Extended Abstracts
Conference
184th Electrochemical Society Meeting
Publisher
Electrochemical Society ECS
Pages
514-515
ISBN
Open access
Open access in the publisher’s service
No information
Self-archived
No
Other information
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No