Metal fluoride thin films deposited by atomic layer epitaxy
Year of publication
1993
Authors
Ylilammi, Markku; Ranta-aho, Timo
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Ylilammi Markku
Publication type
Publication format
Abstract
Parent publication type
Conference
Audience
Scientific
Publication channel information
Parent publication name
9th International Conference on Thin Films, ICTF9: Book of Abstracts
Conference
9th International Conference on Thin Films, ICTF9
Publisher
Austrian Vacuum Society
Open access
Open access in the publisher’s service
No information
Self-archived
No
Other information
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No