Sputter deposition of piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Year of publication
2014
Authors
Barth, S.; Gloess D.; Bartzsch H.; Frach P.; Herzog T.; Walter S.; Heuer H.; Suchaneck, G.; Gerlach G.; Juuti, J.; Palosaari, J.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
2014 7th GMM-Workshop - Proceedings of Energy self-sufficient Sensors
Conference
Publisher
Pages
86-90
ISBN
Publication forum
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology
Publication country
Germany
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
Unknown
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes