Advanced deposition tools for the development of oxide thin films
Year of publication
2023
Authors
Tossi, Camilla; Laouadi, Ornella; Raju, Ramesh; Tittonen, Ilkka; Singh, Aadesh P.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Compilation
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A3 Book section, Chapters in research booksPublication channel information
Parent publication name
Publisher
Pages
135-164
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Materials engineering; Nanotechnology
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1016/B978-0-323-90907-5.00023-3
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes