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Advanced deposition tools for the development of oxide thin films

Year of publication

2023

Authors

Tossi, Camilla; Laouadi, Ornella; Raju, Ramesh; Tittonen, Ilkka; Singh, Aadesh P.

Organizations and authors

Aalto University

Singh Aadesh Orcid -palvelun logo

Tossi Camilla Orcid -palvelun logo

Tittonen Ilkka Orcid -palvelun logo

Laouadi Ornella

Raju Ramesh Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Compilation

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A3 Book section, Chapters in research books

Publication channel information

Pages

135-164

​Publication forum

6192

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1016/B978-0-323-90907-5.00023-3

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes