(oral talk) Low Temperature Plasma-enhanced ALD for SiO<sub>2</sub> Using CO<sub>2</sub>
Year of publication
2019
Authors
Zhu, Zhen; Sippola, Perttu; Modanese, Chiara; Ylivaara, Oili; Merdes, Saoussen; Mizohata, Kenichiro; Salmi, Emma; Di Sabatino, Marisa; Savin, Hele
Organizations and authors
Publication type
Publication format
Abstract
Parent publication type
Conference
Audience
Scientific
Publication channel information
Conference
International Conference on ALD Applications & China ALD Conference
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Materials engineering
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Internationality of the publisher
Domestic
Language
English
International co-publication
Yes
Co-publication with a company
Yes
The publication is included in the Ministry of Education and Culture’s Publication data collection
No