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(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Year of publication

2008

Authors

Asghar, M. I.; Yli-Koski, M.; Savin, H.; Haarahiltunen, A.; Talvitie, H.; Sinkkonen, Juha

Organizations and authors

Aalto University

Savin Hele Orcid -palvelun logo

Asghar Imran

Yli-Koski Marko Orcid -palvelun logo

Publication type

Publication format

Abstract

Parent publication type

Conference

Audience

Scientific

Publication channel information

Conference

European Materials Research Society Spring Meeting

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology

Keywords

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Internationality of the publisher

Domestic

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

No