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(oral talk) Gettering in silicon-on-insulator wafers with polysilicon layer

Year of publication

2008

Authors

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Virkkala, Ville; Talvitie, Heli; Asghar, M. I.; Sinkkonen, Juha

Organizations and authors

Aalto University

Savin Hele Orcid -palvelun logo

Haarahiltunen Antti

Talvitie Heli

Asghar Imran

Yli-Koski Marko

Virkkala Ville

Publication type

Publication format

Abstract

Parent publication type

Conference

Audience

Scientific

Publication channel information

Conference

European Materials Research Society Spring Meeting

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Chemical sciences; Medical biotechnology; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

Domestic

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

No