Atomic layer etching of indium tin oxide
Year of publication
2024
Authors
Kauppinen, Christoffer
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Kauppinen Christoffer
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
42
Issue
2
Article number
022601
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences; Electronic, automation and communications engineering, electronics
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1116/6.0003170
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes