Inherent Area-Selective Atomic Layer Deposition of ZnS
Year of publication
2023
Authors
Zhang, Chao; Vehkamäki, Marko; Leskelä, Markku; Ritala, Mikko
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal/Series
Parent publication name
Volume
52
Pages
9622-9630
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
Yes
Open access of publication channel
Partially open publication channel
License of the publisher’s version
CC BY
Self-archived
No
Other information
Fields of science
Chemical sciences
Publication country
United Kingdom
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1039/d3dt01435e
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes