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Electron radiation sensitive hybrid sol-gel materials for electron-beam lithography and diffractive optics

Year of publication

1998

Authors

Rantala, Juha; Penner, R. Scott; Honkanen, Seppo; Nordman, Nina; Nordman, Olli; Vähäkangas, Jouko; Fallahi, Mahmoud; Peyghambarian, Nasser

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Vähäkangas Jouko

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

Proceedings of SPIE

Parent publication name

Organic-Inorganic Hybrid Materials for Photonics

Conference

Organic-Inorganic Hybrid Materials for Photonics

Publisher

International Society for Optics and Photonics SPIE

Volume

3469

Pages

30-37

ISSN

0277-786X

ISBN

978-0-8194-2924-7

​Publication forum

71479

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1117/12.312923

The publication is included in the Ministry of Education and Culture’s Publication data collection

No