Module Implementation of 3D Sub-THz and THz Silicon Micromachined Systems
Year of publication
2024
Authors
Ermolov, Vladimir; Varonen, Mikko; Hujanen, Arto; Lamminen, Antti; Ailas, Henri; Pursula, Pekka
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Lamminen Antti
Hujanen Arto
Ailas Henri
Varonen Mikko 
Pursula Pekka
Ermolov Vladimir
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Parent publication name
Pages
61-63
ISSN
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics
Keywords
[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1109/APMC60911.2024.10867808
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes