Optical Setup for Laser-Assisted Bonding with Through-Silicon Microscopy Capabilities
Year of publication
2025
Authors
Vlasov, Aleksandr; Uusitalo, Topi; Lepukhov, Evgenii; Viheriälä, Jukka; Guina, Mircea
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
15
Issue
5
Pages
885-893
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
Yes
Open access of publication channel
Partially open publication channel
License of the publisher’s version
CC BY
Self-archived
Yes
License of the self-archived publication
CC BY
Other information
Fields of science
Physical sciences
Identified topic
[object Object]
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1109/TCPMT.2025.3557118
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes