HIM

Zeiss Orion Nanofab helium ion microscope (HIM) is an imaging device similar to scanning electron microscope (SEM). In HIM the sample surface is scanned with positive He ions instead of electrons and objects from mm size to nm size can be studied. The greatest advantages of HIM over SEM are better resolution (even 0.5 nm) large depth of field and possibility to image insulating samples without conductive coating. By using Ne ions instead of He ions also sample modification and milling in nanometer scale is possible. In the beginning of year 2020 the HIM tool was equipped with time-of-flight secondary ion mass spectrometry system, which allows for the analysis elemental and isotopic concentrations of samples with a very high elemental resolution.

2015

University of Jyväskylä

biology, focused ion beam, He ions, high-resolution, imaging, Materials Research

NATURAL SCIENCES, ENGINEERING AND TECHNOLOGY, MEDICAL AND HEALTH SCIENCES

urn:nbn:fi:research-infras-2016111642