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Atomic Layer Deposition and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films

Peer-reviewed
DOI
10.1002/cvde.201507170
Tamm, Aile; Kozlova, Jekaterina; Arroval, Tonis; Aarik, Lauri; Ritslaid, Peeter; Garcia, Hector; Cas...
Chemical Vapor Deposition2015Publications information icon

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

Peer-reviewed
DOI
10.1002/cvde.201407116
Blanquart, Timothee; Kaipio, Mikko; Niinistö, Jaakko; Gavagnin, Marco; Longo, Valentino; Blanquart, ...
Chemical Vapor Deposition2014Publications information icon

Atomic Layer Deposition of LiF Thin Films from Lithd and TiF4 Precursors

Peer-reviewed
DOI
10.1002/cvde.201207026
Mäntymäki, Miia; Hämäläinen, Jani; Puukilainen, Esa; Munnik, Frans; Ritala, Mikko; Leskelä, Markku
Chemical Vapor Deposition2013Publications information icon

Atomic Layer Deposition of TiO2 and ZrO2 Thin Films Using Heteroleptic Guanidinate Precursors

Peer-reviewed
DOI
10.1002/cvde.201407115
Kaipio, Mikko; Blanquart, Timothee; Banerjee, Manish; Xu, Ke; Niinistö, Jaakko; Longo, Valentino; Mi...
Chemical Vapor Deposition2014Publications information icon

AlxTayOz Mixture Coatings Prepared Using Atomic Layer Deposition for Corrosion Protection of Steel

Peer-reviewed
DOI
10.1002/cvde.201207028
Härkönen, Emma; Diaz, Belen; Swiatowska, Jolanta; Maurice, Vincent; Seyeux, Antoine; Fenker, Martin;...
Chemical Vapor Deposition2013Publications information icon

Photocatalytic Properties of WO3/TiO2 Core/Shell Nanofibers prepared by Electrospinning and Atomic Layer Deposition

Peer-reviewed
DOI
10.1002/cvde.201207037
Szilagyi, Imre Miklos; Santala, Eero; Heikkilä, Mikko; Pore, Viljami; Kemell, Marianna; Nikitin, Tim...
Chemical Vapor Deposition2013Publications information icon

Atomic Layer Deposition of Groups 4 and 5 Transition Metal Oxide Thin Films:Focus on Heteroleptic Precursors

Peer-reviewed
DOI
10.1002/cvde.201400055
Blanquart, Timothee; Niinistö, Jaakko; Ritala, Mikko; Leskelä, Markku
Chemical Vapor Deposition2014Publications information icon

Introduction: basic features and historical development of atomic layer deposition

Peer-reviewed
Niinistö, Jaakko; Niinistö, Lauri
Wiley-VCH Verlag2012Publications information icon

Residual stress in thin films made by atomic layer deposition

Ylivaara, Oili; Puurunen, Riikka
HERALD WG2 Workshop & 4th Annual Seminar of Finnish Center of Excellence in Atomic Layer Deposit...2016Publications information icon

Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model

Peer-reviewed
Puurunen, Riikka
Chemical Vapor Deposition2003

Atomic Layer Deposition and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films

Peer-reviewed
DOI
10.1002/cvde.201507170
2015

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

Peer-reviewed
DOI
10.1002/cvde.201407116
2014

Atomic Layer Deposition of LiF Thin Films from Lithd and TiF4 Precursors

Peer-reviewed
DOI
10.1002/cvde.201207026
2013

Atomic Layer Deposition of TiO2 and ZrO2 Thin Films Using Heteroleptic Guanidinate Precursors

Peer-reviewed
DOI
10.1002/cvde.201407115
2014

AlxTayOz Mixture Coatings Prepared Using Atomic Layer Deposition for Corrosion Protection of Steel

Peer-reviewed
DOI
10.1002/cvde.201207028
2013

Photocatalytic Properties of WO3/TiO2 Core/Shell Nanofibers prepared by Electrospinning and Atomic Layer Deposition

Peer-reviewed
DOI
10.1002/cvde.201207037
2013

Atomic Layer Deposition of Groups 4 and 5 Transition Metal Oxide Thin Films:Focus on Heteroleptic Precursors

Peer-reviewed
DOI
10.1002/cvde.201400055
2014

Introduction: basic features and historical development of atomic layer deposition

Peer-reviewed
2012

Residual stress in thin films made by atomic layer deposition

2016

Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model

Peer-reviewed
2003