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Displaying results 1 - 10 / 11710
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Authors
Publication channel
Year
(oral talk) Low Temperature
Plasma
-enhanced
ALD
for SiO
2
Using CO
2
Zhu, Zhen; Sippola, Perttu; Modanese, Chiara; Ylivaara, Oili; Merdes, Saoussen; Mizohata, Kenichiro;...
International Conference on
ALD
Applications & China
ALD
Conference
2019
Pushing the limits of
plasma
ALD
conformality
Putkonen, Matti; Kariniemi, Maarit; Niinistö, J.; Vehkamäki, M.; Kemell, M.; Ritala, M.; Leskelä, M....
-
2011
(poster) New
Method
for Ohmic Metal to Si Contact Formation Utilizing Highly Charged
ALD
Dielectric.
Open access
Lahtiluoma, Lassi; Setälä, Olli; Vähänissi, Ville; Savin, Hele
-
2024
Conformality of remote
plasma
enhanced
ALD
processes: an experimental study
Kariniemi, Maarit; Niinistö, J.; Putkonen, Matti; Vehkamäki, M.; Kemell, M.; Ritala, M.; Leskelä, M.
-
2011
Plasma
Treatment as a Sustainable
Method
for Enhancing the Wettability of Jute Fabrics
Peer-reviewed
Open access
DOI
10.3390/su15032125
Aleksandra Ivanovska; Marija Milošević; Bratislav Obradović; Zorica Svirčev; Mirjana Kostić
Sustainability (Switzerland)
2023
Oxide thin films by
ALD
for advanced applications
Peer-reviewed
Niinistö, Lauri
American Vacuum Society
2002
(Semi-)transparent
ALD
TiN microelectrodes
Open access
DOI
10.3389/conf.fncel.2018.38.00111
Ryynänen, Tomi; Pelkonen, Anssi; Grigoras, Kestutis; Ylivaara, Oili; Ahopelto, Jouni; Prunnila, Mika...
11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
2018
Consecutive transients
method
for
plasma
diagnostics of electron cyclotron resonance ion sources
Open access
Luntinen, Miha
JYU dissertations
2024
Microelectrode Array With Transparent
ALD
TiN Electrodes
Peer-reviewed
Open access
DOI
10.3389/fnins.2019.00226
Ryynänen, Tomi; Pelkonen, Anssi; Grigoras, Kestutis; Ylivaara, Oili M.E.; Hyvärinen, Tanja; Ahopelto...
Frontiers in neuroscience
2019
Biocompatible
ALD
barrier coatings for medical devices
Peer-reviewed
DOI
10.1109/EDTM.2017.7947504
Matvejeff, Mikko; Ek, Satu; Ritasalo, Riina; Kalliomäki, Jesse; Järvinen, Päivi; Ylivaara, Oili; Öst...
Electron Devices Technology and Manufacturing Coneference, EDTM 2017
2017
(oral talk) Low Temperature
Plasma
-enhanced
ALD
for SiO
2
Using CO
2
2019
Pushing the limits of
plasma
ALD
conformality
2011
(poster) New
Method
for Ohmic Metal to Si Contact Formation Utilizing Highly Charged
ALD
Dielectric.
Open access
2024
Conformality of remote
plasma
enhanced
ALD
processes: an experimental study
2011
Plasma
Treatment as a Sustainable
Method
for Enhancing the Wettability of Jute Fabrics
Peer-reviewed
Open access
DOI
10.3390/su15032125
2023
Oxide thin films by
ALD
for advanced applications
Peer-reviewed
2002
(Semi-)transparent
ALD
TiN microelectrodes
Open access
DOI
10.3389/conf.fncel.2018.38.00111
2018
Consecutive transients
method
for
plasma
diagnostics of electron cyclotron resonance ion sources
Open access
2024
Microelectrode Array With Transparent
ALD
TiN Electrodes
Peer-reviewed
Open access
DOI
10.3389/fnins.2019.00226
2019
Biocompatible
ALD
barrier coatings for medical devices
Peer-reviewed
DOI
10.1109/EDTM.2017.7947504
2017
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